High-performance wafer-scale transfer-free graphene microphones
R. Pezone (TU Delft - Electronic Components, Technology and Materials)
Gabriele Baglioni (TU Delft - QN/van der Zant Lab, Kavli institute of nanoscience Delft)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Peter G. Steeneken (Kavli institute of nanoscience Delft, TU Delft - QN/Steeneken Lab, TU Delft - Dynamics of Micro and Nano Systems)
Sten Vollebregt (TU Delft - Electronic Components, Technology and Materials)
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Abstract
A repeatable method to fabricate multi-layer graphene (ML-gr) membranes of 2r = 85 - 155 μm (t < 10 nm) with a 100% yield on 100 mm wafers is demonstrated. These membranes show higher sensitivity than a commercial MEMS-Mic combined with an area reduction of 10x. The process overcomes one of the main limitations when integrating graphene diaphragms in microphones due to the absence of automatic transfer methods on non-planarized target substrates. This method aims to overcome this limitation by combining a full-dry release of Chemical Vapor Deposition (CVD) graphene by Deep Reactive Ion Etching (DRIE) and vapor HF (VHF).