Influence of the formation parameters on the humidity sensing characteristics of a capacitive humidity sensor based on porous silicon

Conference paper (1999)

Authors

GMO O Halloran External organisation
W. van der Vlist Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
P.J. French Electronic Instrumentation - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

1999

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials