Influence of the formation parameters on the humidity sensing characteristics of a capacitive humidity sensor based on porous silicon
Conference Paper
(1999)
Author(s)
G.M. O'Halloran (External organisation)
W. van der Vlist (TU Delft - Electronic Components, Technology and Materials)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Pim J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:31efe276-b153-4ef6-9836-0317bf1bcf96
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Publication Year
1999
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
117-120
ISBN (print)
90-76699-02-X
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