Reduction of alloying temperature of metallization stacks containing Al/Ti/TiN from 400 to 300°C

Conference paper (2008)

Authors

G. Lorito Old - EWI Sect. ECTM
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Old - EWI Sect. ECTM
More Info
expand_more

Published Date

2008

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Old - EWI Sect. ECTM