Reduction of surface roughness of a silicon chip for advanced nanocalorimetry
Journal Article
(2008)
Author(s)
L. La Spina (TU Delft - Old - EWI Sect. ECTM)
D Ovchinnikov (External organisation)
WHA Wien (TU Delft - Electronic Components, Technology and Materials)
AW van Herwaarden (External organisation)
EJG Goudena (TU Delft - Old - EWI Sect. ECTM)
J Loos (External organisation)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
To reference this document use:
https://resolver.tudelft.nl/uuid:329415cc-c809-4888-adec-52324fab0720
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Publication Year
2008
Research Group
Old - EWI Sect. ECTM
Volume number
144
Pages (from-to)
403-409
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