Thickness determination of thin (similar to 20 nm) microcrystalline silicon layers
Journal Article
(2005)
Author(s)
A Gordijn (External organisation)
J. Loffler (External organisation)
WM Arnoldbik (External organisation)
F.D. Tichelaar (TU Delft - QN/High Resolution Electron Microscopy)
JK Rath (External organisation)
REI Schropp (External organisation)
Research Group
QN/High Resolution Electron Microscopy
To reference this document use:
https://resolver.tudelft.nl/uuid:330676dd-f79c-45d6-bd90-e52288563c58
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Publication Year
2005
Research Group
QN/High Resolution Electron Microscopy
Issue number
1-4
Volume number
87
Pages (from-to)
445-455
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