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J. Loffler
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Thickness determination of thin (similar to 20 nm) microcrystalline silicon layers
Journal article (2005) -
A Gordijn (author)
,
J. Loffler (author)
,
WM Arnoldbik (author)
,
F. D. Tichelaar (author)
,
JK Rath (author)
,
REI Schropp (author)