Design and characterization of integrated passive elements on high ohmic silicon
Conference Paper
(2003)
Author(s)
E Valletta (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
J van Beek (External organisation)
A den Dekker (External organisation)
N Pulsford (External organisation)
HFF Jos (External organisation)
LCN de Vreede (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Old - EWI Ch. Integrated Sensing Devices
To reference this document use:
https://resolver.tudelft.nl/uuid:352ed56c-5bba-461c-afd2-2f289a4df77a
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Publication Year
2003
Research Group
Old - EWI Ch. Integrated Sensing Devices
Pages (from-to)
1235-1238
ISBN (print)
0-7803-7695-1
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