C-V Characterization of MOS capacitators on high resistivity silicon substrate
Conference Paper
(2003)
Author(s)
B Rong (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
ABM Jansman (External organisation)
B. Rejaei Salmassi (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
AGR Evans (External organisation)
Research Group
Old - EWI Ch. Integrated Sensing Devices
To reference this document use:
https://resolver.tudelft.nl/uuid:3580f175-b6ad-4302-ad66-8f1bdf71b371
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Publication Year
2003
Research Group
Old - EWI Ch. Integrated Sensing Devices
Pages (from-to)
1-4
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