Detailed modeling of chemistry and transport phenomena in CVD reactors
Doctoral Thesis
(1996)
Author(s)
KJ Kuijlaars (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
Research Group
Old - sect Kramers Laboratory (MSP/FT)
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Publication Year
1996
Research Group
Old - sect Kramers Laboratory (MSP/FT)
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