Electron-Beam-Induced of 3.5 nm Half-Pitch Dense Patterns on Bulk Si
Journal Article
(2011)
Author(s)
J.C. van Oven (External organisation)
F. Berwald (TU Delft - ImPhys/Charged Particle Optics)
K.K. Berggren (TU Delft - QN/Fysics of NanoElectronics)
P Kruit (TU Delft - ImPhys/Charged Particle Optics)
Cornelis Wouter Hagen (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
DOI related publication
https://doi.org/10.1116/1.3640743
To reference this document use:
https://resolver.tudelft.nl/uuid:36999ebd-114e-4c0c-8b5e-68db0bd2ed73
More Info
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Publication Year
2011
Research Group
ImPhys/Charged Particle Optics
Issue number
6
Volume number
29
Pages (from-to)
1-6
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