Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications
Journal Article
(2002)
Author(s)
E Connolly (TU Delft - Electronic Instrumentation)
GM O'Halloran (External organisation)
HTM Pham (TU Delft - Electronic Components, Technology and Materials)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
P.J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:36c0e5d5-e5e9-41b9-9309-cd0a9cd74adc
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Publication Year
2002
Research Group
Electronic Instrumentation
Volume number
A 99
Pages (from-to)
25-30
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