Relation between texture and stress in thin sputtered molybdenum layers.
Conference Paper
(2001)
Author(s)
IM van den Berk (External organisation)
LJ Seijbel (TU Delft - OLD Virtual Materials and Mechanics)
R Delhez (TU Delft - OLD Virtual Materials and Mechanics)
Research Group
OLD Virtual Materials and Mechanics
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https://resolver.tudelft.nl/uuid:3861036f-70f3-432b-89f3-d0ceef9ac0c9
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Publication Year
2001
Research Group
OLD Virtual Materials and Mechanics
Pages (from-to)
O3.22.1-O3.22.6
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