X-X: single-crystalline Si TFTs fabricated with ¿-Czochralski (grain-filter) process
Conference Paper
(2002)
Author(s)
Ryoichi Ishihara (TU Delft - Electronic Components, Technology and Materials)
BD van Dijk (TU Delft - Electronic Components, Technology and Materials)
PC van der Wilt (TU Delft - Electronic Components, Technology and Materials)
JW Metselaar (TU Delft - Electronic Components, Technology and Materials)
Kees Beenakker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:396a2f52-0cb1-472b-8a1a-9998ee894ddc
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Publication Year
2002
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
159-162
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