High-throughput parallel SPM for metrology, defect, and mask inspection

Sadeghian Marnani, H; Herfst, RW; van den Dool, TC; Crowcombe, WE; Winters, J; Kramer, GFIJ

High-throughput parallel SPM for metrology, defect, and mask inspection

Conference paper (2014)

Authors

H Sadeghian Marnani Computational Design and Mechanics

RW Herfst External organisation

TC van den Dool External organisation

WE Crowcombe External organisation

J Winters External organisation

GFIJ Kramer External organisation

Research Group

Computational Design and Mechanics

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Published Date

2014

Language

English

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Research Group

Computational Design and Mechanics

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