High-throughput parallel SPM for metrology, defect, and mask inspection

Conference paper (2014)

Authors

H. Sadeghian Marnani Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
RW Herfst External organisation
TC van den Dool External organisation
WE Crowcombe External organisation
J Winters External organisation
GFIJ Kramer External organisation
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
More Info
expand_more

Published Date

2014

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics