High Speed anisotropic dry etching of CoNbZr for next generation magnetic recording.
Report
(2000)
Author(s)
MSP Andriesse (TU Delft - QN/Kavli Nanolab Delft)
T Zijlstra (TU Delft - QN/Kavli Nanolab Delft)
Emile van der Drift (TU Delft - QN/Kavli Nanolab Delft)
Research Group
QN/Kavli Nanolab Delft
To reference this document use:
https://resolver.tudelft.nl/uuid:3b45212e-49e1-4453-bd41-8ea1dbb9de7b
More Info
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Publication Year
2000
Research Group
QN/Kavli Nanolab Delft
Volume number
Progress Report
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