Effect on annealing on mechanical and optical properties of in-situ doped SiC thin films
Conference Paper
(2001)
Author(s)
HMT Pham (External organisation)
CR de Boer (TU Delft - Electronic Components, Technology and Materials)
C.C.G. Visser (TU Delft - Electronic Components, Technology and Materials)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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Publication Year
2001
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
59-66
ISBN (print)
0277-786X
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