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HMT Pham
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18 records found
New post-processing modules
Conference paper -
L.S. Pakula
,
HMT Pham
,
C.R. de Boer
,
Pasqualina M Sarro
,
P.J. French
Silicon carbide membrane relative humidity sensor with aluminium electrodes
Conference paper -
E Connolly
,
HMT Pham
,
J. Groeneweg
,
Pasqualina M Sarro
,
P.J. French
Evaluation of in-situ doped PECVD SiC thin films for surface micromachining
Conference paper -
HMT Pham
,
C.R. de Boer
,
K Kwakernaak
,
W.G. Sloof
,
Pasqualina M Sarro
Development of post processing micromachining modules for integrated sensors and actuators applications
Report -
HMT Pham
,
L.S. Pakula
,
G. Pandraud
,
P.J. French
,
Pasqualina M Sarro
Novel material for low temperature post-processing micromachining
Conference paper -
L.S. Pakula
,
HMT Pham
,
Pasqualina M Sarro
,
P.J. French
Membrane porous-SiC humidity sensor with aluminium electrodes
Conference paper -
E Connolly
,
HMT Pham
,
Pasqualina M Sarro
,
P.J. French
Influence of deposition parameter and temperature on stress and strain of in-situ doped PECVD silicon carbide
Conference paper -
HMT Pham
,
C.R. de Boer
,
Pasqualina M Sarro
Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining
Conference paper -
HMT Pham
,
C.R. de Boer
,
K Kwakernaak
,
W.G. Sloof
,
Pasqualina M Sarro
Relative humidity sensors for harsh enviroments
Conference paper -
E Connolly
,
HMT Pham
,
J. Groeneweg
,
Pasqualina M Sarro
,
P.J. French
SiC passive optomechanical transducer head for sensor applications
Conference paper -
G. Pandraud
,
L.S. Pakula
,
HMT Pham
,
P.J. French
,
Pasqualina M Sarro
Dry etching release of structures in post-processing surface micromachining using polyimide as a sacrificial layer
Conference paper -
A Bagolini
,
HMT Pham
,
T.L.M. Scholtes
,
L.S. Pakula
,
Pasqualina M Sarro
Through-wafer copper electroplating for 3-D interconnects
Conference paper -
NT Nguyen
,
E Boellaard
,
HMT Pham
,
VG Kiutchoukov
,
G Cracium
,
Pasqualina M Sarro
Investigation of the influence of measurement frequency on the response of humidity sensors based on porous si, porous polysilicon and porous sic
Conference paper -
E Connolly
,
GMO O Halloran
,
HMT Pham
,
Pasqualina M Sarro
,
P.J. French
Non-catalyst and low temperature growth of vertically aligned carbon nanotubes for nanosensors arrays
Conference paper -
HMT Pham
,
C.R. de Boer
,
Pasqualina M Sarro
Effect on annealing on mechanical and optical properties of in-situ doped SiC thin films
Conference paper -
HMT Pham
,
C.R. de Boer
,
C.C.G. Visser
,
Pasqualina M Sarro
Development of post processing micromachining modules for integrated sensors and actuators applications
Report -
HMT Pham
,
? et al
Relative humidity sensors using porous SiC membranes and Al electrodes
Journal article -
E Connolly
,
HMT Pham
,
J. Groeneweg
,
Pasqualina M Sarro
,
P.J. French
Polyimide sacrificial layer for postprocessing surface micromachining
Conference paper -
A Bagolini
,
T.L.M. Scholtes
,
HMT Pham
,
L.S. Pakula
,
Pasqualina M Sarro