Novel material for low temperature post-processing micromachining
Conference Paper
(2001)
Author(s)
L Pakula (TU Delft - Electronic Instrumentation)
HMT Pham (External organisation)
Lina Sarro (TU Delft - Electronic Components, Technology and Materials)
Pim J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:36a5c0c9-680c-481f-ae5f-9f22b18e31be
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Publication Year
2001
Research Group
Electronic Instrumentation
Pages (from-to)
70-73
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