Polyimide sacrificial layer for postprocessing surface micromachining
Conference Paper
(2001)
Author(s)
A Bagolini (External organisation)
T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)
HMT Pham (External organisation)
L Pakula (TU Delft - Electronic Instrumentation)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:cdd7dc07-a150-4632-a2aa-cfc047334022
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Publication Year
2001
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
58-61
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