Evaluation of in-situ doped PECVD SiC thin films for surface micromachining
Conference Paper
(2001)
Author(s)
HMT Pham (External organisation)
CR de Boer (TU Delft - Electronic Components, Technology and Materials)
K Kwakernaak (External organisation)
WG Sloof (TU Delft - OLD Virtual Materials and Mechanics)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:b962c85f-51ec-4904-b65e-ae5b27d4bc9d
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Publication Year
2001
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
856-860
ISBN (print)
90-73461-29-4
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