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KK
K Kwakernaak
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3 records found
Evaluation of in-situ doped PECVD SiC thin films for surface micromachining
Conference paper -
HMT Pham
,
C.R. de Boer
,
K Kwakernaak
,
W.G. Sloof
,
Pasqualina M Sarro
Very thin SiC membranes for micromachines vacuum sensors
Conference paper -
HTM Pham
,
C Fan
,
G. Pandraud
,
J.F. Creemer
,
N.M. van der Pers
,
P Visser
,
K Kwakernaak
,
Pasqualina M Sarro
Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining
Conference paper -
HMT Pham
,
C.R. de Boer
,
K Kwakernaak
,
W.G. Sloof
,
Pasqualina M Sarro