Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining
Conference Paper
(2001)
Author(s)
HMT Pham (External organisation)
CR de Boer (TU Delft - Electronic Components, Technology and Materials)
K Kwakernaak (External organisation)
WG Sloof (TU Delft - OLD Virtual Materials and Mechanics)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:d662a1c5-bc8a-4843-a818-2072970ad166
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Publication Year
2001
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
272-279
ISBN (print)
0277-786X
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