Very thin SiC membranes for micromachines vacuum sensors
Conference Paper
(2008)
Author(s)
HTM Pham (TU Delft - Old - EWI Sect. ECTM)
C Fan (External organisation)
Grégory Pandraud (TU Delft - Electronic Instrumentation)
JF Creemer (TU Delft - Electronic Instrumentation)
NM van der Pers (TU Delft - OLD Virtual Materials and Mechanics)
P. Visser (TU Delft - OLD Virtual Materials and Mechanics)
K Kwakernaak (External organisation)
Pasqualina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Old - EWI Sect. ECTM
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https://resolver.tudelft.nl/uuid:231f7eff-deaa-4c94-b75e-ecce29cb2b6c
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Publication Year
2008
Research Group
Old - EWI Sect. ECTM
Pages (from-to)
1143-1146
ISBN (print)
978-1-4244-2581-5
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