Very thin SiC membranes for micromachines vacuum sensors

Conference paper (2008)

Authors

HTM Pham Old - EWI Sect. ECTM
C Fan External organisation
G. Pandraud Electronic Instrumentation - EEMCS
J.F. Creemer Electronic Instrumentation - EEMCS
N.M. van der Pers OLD Virtual Materials and Mechanics
P Visser OLD Virtual Materials and Mechanics
K Kwakernaak External organisation
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Old - EWI Sect. ECTM
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Published Date

2008

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM