Dry etching release of structures in post-processing surface micromachining using polyimide as a sacrificial layer
Conference Paper
(2001)
Author(s)
A Bagolini (External organisation)
HMT Pham (External organisation)
T.L.M. Scholtes (TU Delft - Electronic Components, Technology and Materials)
L Pakula (TU Delft - Electronic Instrumentation)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:befd2cab-1455-4c01-ac6d-70ed549b809c
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Publication Year
2001
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
769-772
ISBN (print)
90-73461-29-4
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