Development of post processing micromachining modules for integrated sensors and actuators applications
Report
(2003)
Author(s)
HMT Pham (External organisation)
L.S. Pakula (TU Delft - Electronic Instrumentation)
G. Pandraud (TU Delft - Electronic Instrumentation)
Paddy J. French (TU Delft - Electronic Instrumentation)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:9f42fead-3159-4aff-83d8-70d869fbe878
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Publication Year
2003
Research Group
Electronic Instrumentation
Volume number
DMF 5103
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