Development of post processing micromachining modules for integrated sensors and actuators applications

Report (2003)

Authors

HMT Pham External organisation
L.S. Pakula Electronic Instrumentation - EEMCS
G. Pandraud Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2003

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation