Local critical dimension variation from shot-noise related line edge roughness
Journal Article
(2005)
Author(s)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
S. Steenbrink (External organisation)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:3e316578-8176-45cc-9d6d-b85b5c585d71
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Publication Year
2005
Research Group
ImPhys/Charged Particle Optics
Issue number
6
Volume number
23
Pages (from-to)
3033-3036
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