Effect of undercut on the resonant behaviour of silicon nitride cantilevers

Journal Article (2009)
Author(s)

K Babaei Gavan (TU Delft - QN/Mol. Electronics & Devices)

E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)

W.J. Venstra (TU Delft - QN/Mol. Electronics & Devices)

M.R. Zuiddam (TU Delft - QN/Kavli Nanolab Delft)

Herre S J Zant (TU Delft - QN/Mol. Electronics & Devices)

Research Group
QN/Mol. Electronics & Devices
More Info
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Publication Year
2009
Research Group
QN/Mol. Electronics & Devices
Issue number
3
Volume number
19
Pages (from-to)
035003-1-035003-8

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