Effect of undercut on the resonant behaviour of silicon nitride cantilevers
Journal Article
(2009)
Author(s)
K Babaei Gavan (TU Delft - QN/Mol. Electronics & Devices)
E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)
W.J. Venstra (TU Delft - QN/Mol. Electronics & Devices)
M.R. Zuiddam (TU Delft - QN/Kavli Nanolab Delft)
Herre S J Zant (TU Delft - QN/Mol. Electronics & Devices)
Research Group
QN/Mol. Electronics & Devices
To reference this document use:
https://resolver.tudelft.nl/uuid:3e586217-0000-410f-956a-5f0c83eff6e9
More Info
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Publication Year
2009
Research Group
QN/Mol. Electronics & Devices
Issue number
3
Volume number
19
Pages (from-to)
035003-1-035003-8
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