Low-energy foil aberration corrector

Journal Article (2002)
Author(s)

RH van Aken (TU Delft - ImPhys/Charged Particle Optics)

C.W. Hagen (TU Delft - ImPhys/Charged Particle Optics)

JE Barth (TU Delft - ImPhys/Charged Particle Optics)

P. Kruit (TU Delft - ImPhys/Charged Particle Optics)

Research Group
ImPhys/Charged Particle Optics
More Info
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Publication Year
2002
Research Group
ImPhys/Charged Particle Optics
Issue number
3-4
Volume number
93
Pages (from-to)
321-330

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