High resolution reactive ion etching of GaN and etch-induced effects.

R Cheung (External organisation)

RJ Reeves (External organisation)

B Rong (TU Delft - QN/Kavli Nanolab Delft)

SA Brown (External organisation)

EJM Fakkeldij (External organisation)

E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)

M Kamp (External organisation)