Silicon films deposited from hydrogen diluted silane using a layer-by-layer approach
Journal Article
(2007)
Author(s)
G van Elzakker (TU Delft - Electronic Components, Technology and Materials)
Frans Tichelaar (TU Delft - QN/High Resolution Electron Microscopy)
M. Zeman (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:41d8b552-e9a0-453b-ae30-e698f1f26bb8
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Volume number
515
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