Performance analysis of choherent optical scatterometry
Journal Article
(2011)
Author(s)
O. El El Gawhary (TU Delft - ImPhys/Optics)
N Kumar (TU Delft - ImPhys/Optics)
Silvania Pereira (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:429f479f-134c-4d3a-a72a-e71ca8a2363e
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Publication Year
2011
Language
English
Research Group
ImPhys/Optics
Issue number
4
Volume number
105
Pages (from-to)
775-781
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