N. Kumar

info

Please Note

<p>This page displays the records of the person named above and is not linked to a unique person identifier. This record may need to be merged to a profile.</p>

Conference paper (1)

Journal article (1)

2 records found

Towards Grating Reconstruction in Coherent Fourier Scatterometry

Conference paper (2014) - N Kumar , S Roy , O El Gawhary , SF Pereira , WMJ Coene , HP Urbach

Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem

Journal article (2013) - S Roy , N Kumar , SF Pereira , HP Urbach