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N. Kumar

Conference paper (2)

Journal article (1)

3 records found

1

Towards Grating Reconstruction in Coherent Fourier Scatterometry

Conference paper (2014) - N. Kumar (author) , S. Roy (author) , O. El Gawhary (author) , S.F. Pereira (author) , WMJ Coene (author) , Paul Urbach (author)

Lowering the Cross Correlation between Different Shape Parameters of the Inverse Grating Problem in Coherent Fourier Scatterometry¿

Conference paper (2013) - S. Roy (author) , N Kumar (author) , S.F. Pereira (author) , Paul Urbach (author)

Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem

Journal article (2013) - S. Roy (author) , N Kumar (author) , S.F. Pereira (author) , Paul Urbach (author)