Lowering the cross correlation between different shape parameters of the inverse grating problem in coherent Fourier scatterometry
Conference Paper
(2014)
Author(s)
S. Roy (TU Delft - ImPhys/Optics)
N. Kumar (TU Delft - ImPhys/Optics)
S. F. Pereira (TU Delft - Applied Sciences)
H. P. Urbach (TU Delft - Applied Sciences)
Research Group
ImPhys/Pereira group
DOI related publication
https://doi.org/10.1007/978-3-642-36359-7_5
Final published version
To reference this document use
https://resolver.tudelft.nl/uuid:731a7d04-a044-4e0f-8496-47e82e775fa6
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Publication Year
2014
Language
English
Research Group
ImPhys/Pereira group
Pages (from-to)
43-48
Publisher
Springer
ISBN (print)
9783642363580
Event
7th International Workshop on Advanced Optical Imaging and Metrology (2013-09-08 - 2013-09-11), Berlin Heidelberg, Nurtingen, Germany
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