Lowering the Cross Correlation between Different Shape Parameters of the Inverse Grating Problem in Coherent Fourier Scatterometry¿
Conference Paper
(2013)
Author(s)
S Roy (TU Delft - ImPhys/Optics)
N Kumar (TU Delft - ImPhys/Optics)
SF Pereira (TU Delft - ImPhys/Optics)
HP Urbach (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:731a7d04-a044-4e0f-8496-47e82e775fa6
More Info
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Publication Year
2013
Research Group
ImPhys/Optics
Pages (from-to)
43-48
Publisher
Springer
ISBN (print)
978-3-642-36359-7
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