Lowering the Cross Correlation between Different Shape Parameters of the Inverse Grating Problem in Coherent Fourier Scatterometry¿

Roy, S; Kumar, N.; Pereira, Silvania F.; Paul Urbach, H.

Lowering the Cross Correlation between Different Shape Parameters of the Inverse Grating Problem in Coherent Fourier Scatterometry¿

Conference paper (2013)

Authors

S Roy ImPhys/Optics

N. Kumar ImPhys/Optics

Silvania F. Pereira ImPhys/Optics

H. Paul Urbach ImPhys/Optics

Research Group

ImPhys/Optics

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Published Date

2013

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Research Group

ImPhys/Optics

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