Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.

Endres, J; Kumar, N; Petrik, P.; Heidenreich, S; Pereira, S. F.; Paul Urbach, H. P.; Bodermann, B

Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.

Journal article (2014)

Authors

J Endres External organisation

N Kumar ImPhys/Optics

P. Petrik ImPhys/Optics

S Heidenreich External organisation

S. F. Pereira ImPhys/Optics

H. P. Paul Urbach ImPhys/Optics

B Bodermann External organisation

Research Group

ImPhys/Optics

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Published Date

2014

Language

English

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Research Group

ImPhys/Optics

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