Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.
Journal Article
(2014)
Author(s)
J Endres (External organisation)
N Kumar (TU Delft - ImPhys/Optics)
P Petrik (TU Delft - ImPhys/Optics)
S Heidenreich (External organisation)
Silvania Pereira (TU Delft - ImPhys/Optics)
Paul Urbach (TU Delft - ImPhys/Optics)
B Bodermann (External organisation)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:42de669c-7d32-4677-bd41-0304612b5ee4
More Info
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Publication Year
2014
Language
English
Research Group
ImPhys/Optics
Volume number
9132
Pages (from-to)
1-9
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