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P. Petrik

Conference paper (2)

Journal article (4)

6 records found

1

Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

Journal article (2015) - P. Petrik (author) , N Kumar (author) , M Fried (author) , B Fodor (author) , G Juhasz (author) , S.F. Pereira (author) , S Burger (author) , H.P. Urbach (author)

art.nr. 15002@en

Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Conference paper (2015) - P. Petrik (author) , B Fodor (author) , T Lohner (author) , H. Paul Urbach (author) , B Bodermann (author) , M Fried (author) , E Agocs (author) , P Kozma (author) , J Nador (author) , N. Kumar (author) , J Endres (author) , G Juhasz (author) , C Major (author) , S. F. Pereira (author)

Optical Characterization of laterally and vertically structured oxides and semiconductors

Conference paper (2014) - P. Petrik (author) , N. Kumar (author) , E Agocs (author) , B Fodor (author) , Silvania Pereira (author) , T Lohner (author) , Mi Fried (author) , H.P. Paul Urbach (author)

Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.

Journal article (2014) - J Endres (author) , N Kumar (author) , P. Petrik (author) , S Heidenreich (author) , S. F. Pereira (author) , H. P. Paul Urbach (author) , B Bodermann (author)

Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.

Journal article (2014) - N. Kumar (author) , P. Petrik (author) , GKP Ramanandan (author) , O Gawhary (author) , S Roy (author) , S. F. Pereira (author) , WMJ Coene (author) , Paul Urbach (author)

Optical characterization of gold-cuprous oxide interfaces for terahertz emission applications

Journal article (2014) - GKP Ramanandan (author) , Aurèle Adam (author) , G. Ramakrishnan (author) , P. Petrik (author) , Ruud Hendrikx (author)