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P. Petrik
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Authored
7 records found
Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry
Journal article -
P. Petrik
,
N. Kumar
,
M Fried
,
B Fodor
,
G Juhasz
,
S.F. Pereira
,
S Bürger
,
Paul Urbach
art.nr. 15002@en
art.nr. 15002@en
Optical characterization of gold-cuprous oxide interfaces for terahertz emission applications
Journal article -
GKP Ramanandan
,
A.J.L. Adam
,
G. Ramakrishnan
,
P. Petrik
,
R.W.A. Hendrikx
Optical Characterization of laterally and vertically structured oxides and semiconductors
Conference paper -
P. Petrik
,
N. Kumar
,
E Agocs
,
B Fodor
,
S.F. Pereira
,
T Lohner
,
Mi Fried
,
Paul Urbach
Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.
Journal article -
N. Kumar
,
P. Petrik
,
GKP Ramanandan
,
O. El Gawhary
,
S. Roy
,
S.F. Pereira
,
WMJ Coene
,
Paul Urbach
Measurement comparison of goniometric scatterometry and coherent Fourier scatterometry.
Journal article -
J Endres
,
N. Kumar
,
P. Petrik
,
S Heidenreich
,
S.F. Pereira
,
Paul Urbach
,
B Bodermann
Methods for optical modeling and cross-checking in ellipsometry and scatterometry
Conference paper -
P. Petrik
,
B Fodor
,
T Lohner
,
Paul Urbach
,
B Bodermann
,
M Fried
,
E Agocs
,
P Kozma
,
J Nador
,
N. Kumar
,
J Endres
,
G Juhasz
,
C Major
,
S.F. Pereira
Effect of unintentional surface layers in grating reconstruction with coherent Fourier Scatterometry.
Journal article -
N. Kumar
,
P. Petrik
,
S.F. Pereira
,
Paul Urbach