Towards Grating Reconstruction in Coherent Fourier Scatterometry
Conference Paper
(2014)
Author(s)
N Kumar (TU Delft - ImPhys/Optics)
S Roy (TU Delft - ImPhys/Optics)
O El Gawhary (TU Delft - ImPhys/Optics)
SF Pereira (TU Delft - ImPhys/Optics)
WMJ Coene (External organisation)
HP Urbach (TU Delft - ImPhys/Optics)
DOI related publication
https://doi.org/10.1007/978-3-642-36359-7_109
Final published version
To reference this document use
https://resolver.tudelft.nl/uuid:abae880a-2336-46c4-b49a-5b372995eed8
More Info
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Publication Year
2014
Language
English
Pages (from-to)
591-594
Publisher
Springer
ISBN (print)
978-3-642-36359-7
Event
Downloads counter
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