Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.

Kumar, N.; Petrik, P.; Ramanandan, GKP; Gawhary, O; Roy, S; Pereira, S. F.; Coene, WMJ; Urbach, Paul

Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.

Journal article (2014)

Authors

N. Kumar ImPhys/Optics

P. Petrik ImPhys/Optics

GKP Ramanandan External organisation

O Gawhary ImPhys/Optics

S Roy ImPhys/Optics

S. F. Pereira ImPhys/Optics

WMJ Coene External organisation

Paul Urbach ImPhys/Optics

Research Group

ImPhys/Optics

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Published Date

2014

Language

English

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Research Group

ImPhys/Optics

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