Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.

Journal Article (2014)
Author(s)

N Kumar (TU Delft - ImPhys/Optics)

P. Petrik (TU Delft - ImPhys/Optics)

GKP Ramanandan (External organisation)

O. El El Gawhary (TU Delft - ImPhys/Optics)

S. Roy (TU Delft - ImPhys/Optics)

S.F. Pereira (TU Delft - ImPhys/Optics)

WMJ Coene (External organisation)

Paul Urbach (TU Delft - ImPhys/Optics)

Research Group
ImPhys/Optics
More Info
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Publication Year
2014
Language
English
Research Group
ImPhys/Optics
Issue number
20
Volume number
22
Pages (from-to)
24678-24688

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