Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.
Journal Article
(2014)
Author(s)
N Kumar (TU Delft - ImPhys/Optics)
P. Petrik (TU Delft - ImPhys/Optics)
GKP Ramanandan (External organisation)
O. Gawhary (TU Delft - ImPhys/Optics)
S. Roy (TU Delft - ImPhys/Optics)
Silvania F. Pereira (TU Delft - ImPhys/Optics)
WMJ Coene (External organisation)
HP Urbach (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:99df6b08-d9a2-482b-ad6c-52af4a20c5e5
More Info
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Publication Year
2014
Language
English
Research Group
ImPhys/Optics
Issue number
20
Volume number
22
Pages (from-to)
24678-24688
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