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WMJ Coene
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4 records found
Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.
Journal article -
N. Kumar
,
P. Petrik
,
GKP Ramanandan
,
O. El Gawhary
,
S. Roy
,
S.F. Pereira
,
WMJ Coene
,
Paul Urbach
Towards Grating Reconstruction in Coherent Fourier Scatterometry
Conference paper -
N. Kumar
,
S. Roy
,
O. El Gawhary
,
S.F. Pereira
,
WMJ Coene
,
Paul Urbach
Towards Grating Reconstruction in Coherent Fourier Scatterometry
Conference paper -
N. Kumar
,
S. Roy
,
O. El Gawhary
,
S.F. Pereira
,
WMJ Coene
,
Paul Urbach
Overlay analysis with coherent Fourier scatterometry
Journal article -
N. Kumar
,
WMJ Coene
,
Paul Urbach