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WMJ Coene

Conference paper (2)

Journal article (1)

3 records found

1

Recontruction of sub-wavelength features and nano-positioning of gratings using coherent Fourier Scatterometry.

Journal article (2014) - N Kumar (author) , P Petrik (author) , GKP Ramanandan (author) , O. El El Gawhary (author) , S. Roy (author) , S. F. Pereira (author) , WMJ Coene (author) , H. Paul Urbach (author)

Towards Grating Reconstruction in Coherent Fourier Scatterometry

Conference paper (2014) - N Kumar (author) , S. Roy (author) , O. El Gawhary (author) , Silvania Pereira (author) , WMJ Coene (author) , Paul Urbach (author)

Towards Grating Reconstruction in Coherent Fourier Scatterometry

Conference paper (2013) - N Kumar (author) , S. Roy (author) , O. El Gawhary (author) , Silvania Pereira (author) , WMJ Coene (author) , Paul Urbach (author)