Phase information in Coherent Fourier Scatterometry
Journal Article
(2013)
Author(s)
N. Kumar (TU Delft - ImPhys/Optics)
Omar El Gawhary (TU Delft - ImPhys/Optics)
S. Roy (TU Delft - ImPhys/Optics)
SF Pereira (TU Delft - ImPhys/Optics)
HP Urbach (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
DOI related publication
https://doi.org/10.1117/12.2020506
To reference this document use:
https://resolver.tudelft.nl/uuid:af571ba2-111b-4eb5-ac09-ca0a63af8d75
More Info
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Publication Year
2013
Language
English
Research Group
ImPhys/Optics
Volume number
8788
Pages (from-to)
1-4
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