Phase information in Coherent Fourier Scatterometry
Journal Article
(2013)
Authors
N. Kumar (ImPhys/Optics)
O. El El Gawhary (ImPhys/Optics)
S. Roy (ImPhys/Optics)
S.F. Pereira (ImPhys/Optics)
Paul Urbach (ImPhys/Optics)
Research Group
ImPhys/Optics
To reference this document use:
https://doi.org/10.1117/12.2020506
TU Delft Repository resolver:
https://resolver.tudelft.nl/af571ba2-111b-4eb5-ac09-ca0a63af8d75
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Publication Year
2013
Language
English
Research Group
ImPhys/Optics
Volume number
8788
Pages (from-to)
1-4
DOI:
https://doi.org/10.1117/12.2020506
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