Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

Petrik, P.; Kumar, N; Fried, M; Fodor, B; Juhasz, G; Pereira, S.F.; Burger, S; Urbach, H.P.

Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

Journal article (2015)

Authors

P. Petrik ImPhys/Optics

N Kumar ImPhys/Optics

M Fried External organisation

B Fodor External organisation

G Juhasz External organisation

S.F. Pereira ImPhys/Optics

S Burger External organisation

H.P. Urbach ImPhys/Optics

Research Group

ImPhys/Optics

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Published Date

2015

Language

English

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Research Group

ImPhys/Optics

Abstract

art.nr. 15002

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