Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry

Journal article (2015)

Authors

P. Petrik ImPhys/Optics - AS
N. Kumar ImPhys/Optics - AS
M Fried External organisation
B Fodor External organisation
G Juhasz External organisation
S.F. Pereira ImPhys/Optics - AS
S Bürger External organisation
Paul Urbach ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
More Info
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Published Date

2015

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics

Abstract

art.nr. 15002