Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry
Journal Article
(2015)
Author(s)
P. Petrik (TU Delft - ImPhys/Optics)
N. Kumar (TU Delft - ImPhys/Optics)
M Fried (External organisation)
B Fodor (External organisation)
G Juhasz (External organisation)
Silvania F. Pereira (TU Delft - ImPhys/Optics)
S Burger (External organisation)
H. Paul Urbach (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
DOI related publication
https://doi.org/10.2971/jeos.2015.15002
To reference this document use:
https://resolver.tudelft.nl/uuid:ca419d49-1928-477f-b270-909bca8a8179
More Info
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Publication Year
2015
Language
English
Research Group
ImPhys/Optics
Volume number
10
Pages (from-to)
1-5
Abstract
art.nr. 15002
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