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M Fried
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2 records found
Fourier ellipsometry: an ellipsometric approach to Fourier scatterometry
Journal article -
P. Petrik
,
N. Kumar
,
M Fried
,
B Fodor
,
G Juhasz
,
S.F. Pereira
,
S Bürger
,
Paul Urbach
art.nr. 15002@en
art.nr. 15002@en
Methods for optical modeling and cross-checking in ellipsometry and scatterometry
Conference paper -
P. Petrik
,
B Fodor
,
T Lohner
,
Paul Urbach
,
B Bodermann
,
M Fried
,
E Agocs
,
P Kozma
,
J Nador
,
N. Kumar
,
J Endres
,
G Juhasz
,
C Major
,
S.F. Pereira