T Lohner | TU Delft Repository

Library

local_library Home Repository

TL

T Lohner

Conference paper (2)

2 records found

1

Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Conference paper (2015) - P. Petrik (author) , B Fodor (author) , T Lohner (author) , H. Paul Urbach (author) , B Bodermann (author) , M Fried (author) , E Agocs (author) , P Kozma (author) , J Nador (author) , N. Kumar (author) , J Endres (author) , G Juhasz (author) , C Major (author) , S. F. Pereira (author)

Optical Characterization of laterally and vertically structured oxides and semiconductors

Conference paper (2014) - P. Petrik (author) , N. Kumar (author) , E Agocs (author) , B Fodor (author) , Silvania Pereira (author) , T Lohner (author) , Mi Fried (author) , H.P. Paul Urbach (author)