Phase retrieval between overlapping orders in coherent Fourier scatterometry using scanning
Journal Article
(2013)
Author(s)
N. Kumar (TU Delft - ImPhys/Optics)
Omar El Gawhary (TU Delft - ImPhys/Optics)
S Roy (TU Delft - ImPhys/Optics)
HP Urbach (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
DOI related publication
https://doi.org/10.2971/jeos.2013.13048
To reference this document use:
https://resolver.tudelft.nl/uuid:07baf216-464b-4784-9ed6-a7f6da4473c4
More Info
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Publication Year
2013
Language
English
Research Group
ImPhys/Optics
Volume number
8
Pages (from-to)
1-8
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