Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem
Journal Article
(2013)
Author(s)
S Roy (TU Delft - ImPhys/Optics)
N Kumar (TU Delft - ImPhys/Optics)
SF Pereira (TU Delft - ImPhys/Optics)
HP Urbach (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
DOI related publication
https://doi.org/10.1088/2040-8978/15/7/075707
Final published version
To reference this document use
https://resolver.tudelft.nl/uuid:0218bf7f-6bce-46a3-beb2-818a4249693c
More Info
expand_more
expand_more
Publication Year
2013
Language
English
Research Group
ImPhys/Optics
Issue number
7
Volume number
15
Pages (from-to)
1-9
Downloads counter
298
Collections
Institutional Repository
Reuse Rights
Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.
Files
Roy_2013_J._Opt._15_075707.pdf
(pdf | 0.784 Mb)
- Embargo expired in 04-12-2013
License info not available