Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem
Journal Article
(2013)
Author(s)
S Roy (TU Delft - ImPhys/Optics)
N Kumar (TU Delft - ImPhys/Optics)
SF Pereira (TU Delft - ImPhys/Optics)
HP Urbach (TU Delft - ImPhys/Optics)
Research Group
ImPhys/Optics
DOI related publication
https://doi.org/10.1088/2040-8978/15/7/075707
Final published version
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https://resolver.tudelft.nl/uuid:0218bf7f-6bce-46a3-beb2-818a4249693c
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Publication Year
2013
Language
English
Research Group
ImPhys/Optics
Issue number
7
Volume number
15
Pages (from-to)
1-9
Downloads counter
265
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