Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem
Journal Article
(2013)
Research Group
ImPhys/Optics
Copyright
© 2013 S. Roy, N. Kumar, S.F. Pereira, Paul Urbach
DOI related publication
https://doi.org/10.1088/2040-8978/15/7/075707
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https://resolver.tudelft.nl/uuid:0218bf7f-6bce-46a3-beb2-818a4249693c
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Publication Year
2013
Language
English
Copyright
© 2013 S. Roy, N. Kumar, S.F. Pereira, Paul Urbach
Research Group
ImPhys/Optics
Issue number
7
Volume number
15
Pages (from-to)
1-9
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