On chip measurement for side-wall roughness in SOI waveguides by atomic force microscopy
Conference Paper
(2008)
Author(s)
C. Yang (TU Delft - Electronic Instrumentation)
E Margallo Balbas (TU Delft - Electronic Instrumentation)
Grégory Pandraud (TU Delft - Electronic Instrumentation)
P. J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:42e2d37d-9254-4899-85a5-c89c69dca2c8
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Publication Year
2008
Research Group
Electronic Instrumentation
Bibliographical Note
NEO@en
Pages (from-to)
48-50
ISBN (print)
88902065-1-9
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