Through-Focus Point-Spread Function Evaluation fro Lens Metrology using the extended Nijboer-Zernike Theory

Conference Paper (2005)
Author(s)

JJM Braat (TU Delft - ImPhys/Optics)

P. Dirksen (External organisation)

AJEM Janssen (External organisation)

Research Group
ImPhys/Optics
More Info
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Publication Year
2005
Research Group
ImPhys/Optics
Bibliographical Note
Niet eerder opgenomen en niet eerder gehonoreerd
Pages (from-to)
299-307
Publisher
Springer
ISBN (print)
3-540-26037-4
Event
The 5th international workshop on automatic processing of Fringe patterns (2005-09-12 - 2005-09-14), Berlin
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