Through-Focus Point-Spread Function Evaluation fro Lens Metrology using the extended Nijboer-Zernike Theory
Conference Paper
(2005)
Author(s)
JJM Braat (TU Delft - ImPhys/Optics)
P. Dirksen (External organisation)
AJEM Janssen (External organisation)
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Publication Year
2005
Bibliographical Note
Niet eerder opgenomen en niet eerder gehonoreerd
Pages (from-to)
299-307
Publisher
Springer
ISBN (print)
3-540-26037-4
Event
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