Monolithic integration of a calorimetric microfluidic flow sensor using flat panel display technology
B. de Wagenaar (Student TU Delft, Holst Centre)
Frennie Bens (Holst Centre)
Alfredo Mameli (Holst Centre)
Auke Kronemeijer (Holst Centre)
Agnes Bußmann (Fraunhofer EMFT)
Bogdan Firtat (National Institute for Research and Development in Microtechnologies (IMT))
Massimo Mastrangeli (TU Delft - Electronic Components, Technology and Materials)
Albert van Breemen (TNO)
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Abstract
This abstract describes the design, simulation and experimental characterization of a thin film thermal flow sensor fabricated using flat panel display technology. Patterned microelectrodes were successfully applied as a thermal flow sensor, showing good correlation between experimental and simulated data. The use of flat panel display technology could provide an interesting option for cost-effective integration of flow sensing in Organ-on-Chip technologies.