Transient Simulations of selective Chemical Vapour Deposition of Tungsten using Phoenics-CVD
Journal Article
(1997)
Author(s)
KJ Kuijlaars (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
C. R. Kleijn (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
Harry EA van den Akker (TU Delft - Old - sect Kramers Laboratory (MSP/FT))
Research Group
Old - sect Kramers Laboratory (MSP/FT)
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https://resolver.tudelft.nl/uuid:44c4cc8d-f070-45d8-ba3a-9f230eed4870
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Publication Year
1997
Research Group
Old - sect Kramers Laboratory (MSP/FT)
Issue number
4
Volume number
10
Pages (from-to)
391-404
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