Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability

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Characterizing size-dependent effective elastic modulus of silicon nanocantilevers using electrostatic pull-in instability

Journal Article (2009)

Author(s)

Hamed Sadeghian Marnani (TU Delft - Computational Design and Mechanics)

C. Yang (TU Delft - Electronic Instrumentation)

J.F.L. Goosen (TU Delft - Computational Design and Mechanics)

E Drift (External organisation)

A Bossche (TU Delft - Electronic Instrumentation)

Paddy J. French (TU Delft - Electronic Instrumentation)

F Van Keulen (TU Delft - Computational Design and Mechanics)

Research Group

Computational Design and Mechanics

CWTS 0.75 <= JFIS < 2.00 Academic journal papers

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https://resolver.tudelft.nl/uuid:44eeb0b7-bda8-4437-92c5-3adfd5d1a74f

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Publication Year

2009

Research Group

Computational Design and Mechanics

Issue number

221903

Volume number

94

Pages (from-to)

1-3

Abstract

This letter presents the application of electrostatic pull-in instability to study the size-dependent effective Young's Modulus E (~170-70 GPA) of [110] silicon nanocantilevers (thickness ~1019-40nm). The presented approach shows substantial advantages over the previous methods used for characterization of nanoelectromechanical systems behaviors. The E is retrieved from the pull-in voltage of the structure via the electromechanical coupled equation, with a typical error of

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