Enhancement of AlN slender piezoelectric cantilevers actuation by PECVD silicon nitride coating

Conference paper (2012)

Authors

A.T. Tran Electronic Components, Technology and Materials - EEMCS
G. Pandraud Electronic Components, Technology and Materials - EEMCS
H. Schellevis Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2012

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials