Enhancement of AlN slender piezoelectric cantilevers actuation by PECVD silicon nitride coating
Conference Paper
(2012)
Author(s)
AT Tran (TU Delft - Electronic Components, Technology and Materials)
G Pandraud (TU Delft - Electronic Components, Technology and Materials)
H Schellevis (TU Delft - Electronic Components, Technology and Materials)
PM Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.proeng.2012.09.095
Final published version
To reference this document use
https://resolver.tudelft.nl/uuid:4540a9a9-a6ad-48e5-bc12-529dec8399ed
More Info
expand_more
expand_more
Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
104-107
Publisher
Elsevier
Event
Eurosensors XXVI, 9-12 September, 2012, Kraków, Poland (2012-09-09 - 2012-09-12), Amsterdam, The Netherlands
Downloads counter
135