Enhancement of AlN slender piezoelectric cantilevers actuation by PECVD silicon nitride coating
Conference Paper
(2012)
Author(s)
A.T. Tran (TU Delft - Electronic Components, Technology and Materials)
G Pandraud (TU Delft - Electronic Components, Technology and Materials)
H. Schellevis (TU Delft - Electronic Components, Technology and Materials)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.proeng.2012.09.095
To reference this document use:
https://resolver.tudelft.nl/uuid:4540a9a9-a6ad-48e5-bc12-529dec8399ed
More Info
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
104-107
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